317 IGPM317.pdf        December 2010
TITLE High Quality Image Formation by Nonlocal Means Applied to High-Angle Annular Darkfield Scanning Transmission Electron Microscopy (HAADF-STEM)
AUTHORS Peter Binev, Francisco Blanco-Silva, Douglas Blom, Wolfgang Dahmen, Philipp Lamby, Robert Sharpley, Thomas Vogt
ABSTRACT We outline a new systematic approach to extracting high quality information from HAADF–STEM images which will be beneficial to the characterization of beam sen- sitive materials. The idea is to treat several, possibly many low electron dose images with specially adapted digital image processing concepts at a minimum allowable spa- tial resolution. Our goal is to keep the overall cumulative electron dose as low as possible while still staying close to an acceptable level of physical resolution. We shall present the main conceptual imaging concepts and restoration methods that we believe are suitable for carrying out such a program and, in particular, allow one to correct special acquisition artifacts which result in blurring, aliasing, rastering distortions and noise.
KEYWORDS
DOI 10.1007/978-1-4614-2191-7
PUBLICATION Modeling Nanoscale Imaging in Electron Microscopy
ed. by Thomas Vogt ; Wolfgang Dahmen ; Peter Binev
Springer eBook Collection : Chemistry and Materials Science 127-145 (2012)