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RWTH Publication No: 47104 2009   IGPM303.pdf |
TITLE |
Super-Resolution Image Reconstruction by Nonlocal Means applied to High-Angle Annular Darkfield Scanning Transmission Electron Microscopy (HAADF-STEM) |
AUTHORS |
Peter Binev, Francisco Blanco-Silva, Douglas Blom, Wolfgang Dahmen, Robert Sharpley, Tom Vogt |
ABSTRACT |
We outline a new systematic approach to extracting high resolution information from HAADF–
STEM images which will be beneficial to the characterization of beam sensitive materials. The
idea is to treat several, possibly many low electron dose images with specially adapted digital
image processing concepts at a minimum allowable spatial resolution. Our goal is to keep the
overall cumulative electron dose as low as possible while still staying close to an acceptable level
of physical resolution. We shall present the main conceptual imaging concepts and restoration
methods that we believe are suitable for carrying out such a program and, in particular, allow one
to correct special acquisition artifacts which result in blurring, aliasing, rastering distortions and
noise.
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KEYWORDS |
high resolution imaging for STEM,
iterated nonlocal means
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